US PATENT SUBCLASS 134 / 902
SEMICONDUCTOR WAFFER


Current as of: June, 1999
Click HD for Main Headings
Click for All Classes

Internet Version by PATENTEC © 1999      Terms of Use



134 /   HD   CLEANING AND LIQUID CONTACT WITH SOLIDS

902SEMICONDUCTOR WAFFER


DEFINITION

Classification: 134/902

SEMICONDUCTOR WAFER:

(under the class definition) Apparatus including means to contact a semiconductor wafer with a liquid.