US PATENT SUBCLASS 204 / 298.34
.~.~.~ Auxiliary electrode, bias means or specified power supply

Current as of: June, 1999
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204 /   HD   CHEMISTRY: ELECTRICAL AND WAVE ENERGY

193  DF  APPARATUS {5}
298.01  DF  .~ Coating, forming or etching by sputtering {2}
298.31  DF  .~.~ Etching {8}
298.34.~.~.~ Auxiliary electrode, bias means or specified power supply

DEFINITION

Classification: 204/298.34

Auxiliary electrode, bias means or specified power supply:

(under subclass 298.31) Apparatus including electrode means in addition to an anode and cathode (e.g., auxiliary electrode, etc.), workpiece biasing means, or significant specified power supply means.