(under subclass 701) A container for a substrate having, or intended to have, a plurality of individual micro-electronic circuit components layered thereon (e.g., a silicon disklike wafer which constitutes a plurality of unseparated, integrated circuit chips).
SEE OR SEARCH THIS CLASS, SUBCLASS:
832, for a cross-reference art collection of semiconductor wafer boats.
SEE OR SEARCH CLASS
118, Coating Apparatus,
500+, for a work holder intended to hold an electronic component or the stock material of an electronic component, during a coating or etching process.
211, Supports: Racks,
41, for a rack for platelike electrical components. 432, Heating, for a housing or holder for an electronic component intended to hold the component during a heating process.
