ETCHING OF SEMICONDUCTOR MATERIAL TO PRODUCE AN ARTICLEHAVING A NONELECTRICAL FUNCTION:
(under the class definition) Process of etching a semiconductive precursor, substrate, or device to produce an article whose function is not related to the conduction of electricity.
(1) Note. This subclass is directed to the manufacture of a semiconductor containing article which has a stated function which is nonelectrical in nature, e.g., pressure diaphragm, spring, or coil, etc.
SEE OR SEARCH CLASS
438, Semiconductor Device Manufacturing: Process, for (a) combined processes and (b) unit operation not elsewhere provided for manufacturing a semiconductive electrical substrate or device.