US PATENT SUBCLASS 216 / 2
ETCHING OF SEMICONDUCTOR MATERIAL TO PRODUCE AN ARTICLE HAVING A NONELECTRICAL FUNCTION


Current as of: June, 1999
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216 /   HD   ETCHING A SUBSTRATE: PROCESSES

2ETCHING OF SEMICONDUCTOR MATERIAL TO PRODUCE AN ARTICLE HAVING A NONELECTRICAL FUNCTION


DEFINITION

Classification: 216/2

ETCHING OF SEMICONDUCTOR MATERIAL TO PRODUCE AN ARTICLE HAVING A NONELECTRICAL FUNCTION:

(under the class definition) Process of etching a semiconductive precursor, substrate, or device to produce an article whose function is not related to the conduction of electricity.

(1) Note. This subclass is directed to the manufacture of a semiconductor containing article which has a stated function which is nonelectrical in nature, e.g., pressure diaphragm, spring, or coil, etc.

SEE OR SEARCH CLASS

438, Semiconductor Device Manufacturing: Process, for (a) combined processes and (b) unit operation not elsewhere provided for manufacturing a semiconductive electrical substrate or device.