US PATENT SUBCLASS 219 / 121.19
.~.~.~.~ Etching or trimming


Current as of: June, 1999
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219 /   HD   ELECTRIC HEATING

50  DF  METAL HEATING (E.G., RESISTANCE HEATING) {19}
121.11  DF  .~ By arc {16}
121.12  DF  .~.~ Using electron beam {12}
121.18  DF  .~.~.~ Cutting {1}
121.19.~.~.~.~ Etching or trimming {1}
121.2  DF  .~.~.~.~.~> Methods


DEFINITION

Classification: 219/121.19

Etching or trimming:

(under subclass 121.18) Subject matter wherein the cut is superficial or partially through the workpiece.

SEE OR SEARCH CLASS

216, Etching a Substrate: Processes,

63, and 94 for the use of an election beam in etching.

438, Semiconductor Device Manufacturing: Process, particularly

661, for combined processes for trimming a conductive pathway on a semiconductive substrate.