US PATENT SUBCLASS 427 / 582
.~ Photoinitiated chemical vapor deposition (i.e., photo CVD)

Current as of: June, 1999
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427 /   HD   COATING PROCESSES

457  DF  DIRECT APPLICATION OF ELECTRICAL, MAGNETIC, WAVE, OR PARTICULATE ENERGY {15}
582.~ Photoinitiated chemical vapor deposition (i.e., photo CVD) {2}
583  DF  .~.~> Silicon containing coating
584  DF  .~.~> Metal, metal alloy, or metal oxide coating

DEFINITION

Classification: 427/582

Photoinitiated chemical vapor deposition (i.e., photo CVD):

(under subclass 457) Processes wherein a chemical vapor

reaction driven by the absorption of light occurs and a reaction product is deposited on a substrate.

(1) Note. In processes involving photo initiated chemical vapor deposition, the wave length or the specific energy level of a photon are generally identified.