US PATENT SUBCLASS 438 / 16
.~ Optical characteristic sensed


Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

14  DF  WITH MEASURING OR TESTING {3}
16.~ Optical characteristic sensed


DEFINITION

Classification: 438/16

Optical characteristic sensed:

(under subclass 14) Process wherein the sensed condition is an optical characteristic of the process or of the device made thereby.

(1) Note. Optical aligning per se is not deemed to be a measurement of an optical characteristic and as such would not bring original classification to this subclass solely based on that claimed feature.

SEE OR SEARCH CLASS

348, Television,

86+, for manufacturing wherein a picture signal generator (i.e., television camera) is utilized for monitoring a manufacturing operation.

356, Optics: Measuring and Testing, for optical alignment processes.

382, Image Analysis, especially

141+, for a manufacturing process using image analysis, aligning images/masks, or pattern recognition.