US PATENT SUBCLASS 438 / 677
.~.~.~ Pretreatment of surface to enhance or retard deposition


Current as of: June, 1999
Click HD for Main Headings
Click for All Classes

Internet Version by PATENTEC © 1999      Terms of Use



438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

584  DF  COATING WITH ELECTRICALLY OR THERMALLY CONDUCTIVE MATERIAL {2}
597  DF  .~ To form ohmic contact to semiconductive material {24}
674  DF  .~.~ Selective deposition of conductive layer {3}
677.~.~.~ Pretreatment of surface to enhance or retard deposition


DEFINITION

Classification: 438/677

Pretreatment of surface to enhance or retard deposition:

(under subclass 674) Processes including a step of treating the substrate surface preparatory to the selective deposition step to increase or decrease the deposition thereon.