US PATENT SUBCLASS 438 / 7
.~ Optical characteristic sensed


Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

5  DF  INCLUDING CONTROL RESPONSIVE TO SENSED CONDITION {3}
7.~ Optical characteristic sensed {1}
8  DF  .~.~> Chemical etching {1}


DEFINITION

Classification: 438/7

Optical characteristic sensed:

(under subclass 5) Process wherein the sensed condition is an optical property of the device or an optical property of the process.

(1) Note. Optical aligning, per se, is not deemed to be a control responsive operation for the purposes of this subclass.

SEE OR SEARCH CLASS

348, Television,

86+, for manufacturing wherein a picture signal generator (i.e., television camera) is utilized for monitoring a manufacturing operation.

356, Optics: Measuring and Testing, for optical alignment processes.

382, Image Analysis, for methods for the automated analysis of an image or recognition of a pattern, including measuring significant characteristics of the image or pattern.