| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
| 758 | DF | COATING OF SUBSTRATE CONTAINING SEMICONDUCTOR REGION OR OF SEMICONDUCTOR SUBSTRATE {6} |
| 761 | | .~ Multiple layers {2} |
| 762 | DF | .~.~> At least one layer formed by reaction with substrate |
| 763 | DF | .~.~> Layers formed of diverse composition or by diverse coating processes |