US PATENT SUBCLASS 438 / 934
SHEET RESISTANCE (I.E., DOPANT PARAMETERS)


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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

934SHEET RESISTANCE (I.E., DOPANT PARAMETERS)


DEFINITION

Classification: 438/934

SHEET RESISTANCE (I.E., DOPANT PARAMETERS):

Art collection directed to the electrical resistivity of a thin film of semiconductor material.