US PATENT SUBCLASS 438 / 966
SELECTIVE OXIDATION OF ION-AMORPHOUSIZED LAYER


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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

966SELECTIVE OXIDATION OF ION-AMORPHOUSIZED LAYER


DEFINITION

Classification: 438/966

SELECTIVE OXIDATION OF ION-AMORPHOUSIZED LAYER

Art collection involving enhancing the oxidation of predetermined substrate regions by ion amorphousization of the regions.