US PATENT SUBCLASS 438 / FOR 255
.~.~ Autodoping control (437/95)


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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

FOR 149  DF  INCLUDING FORMING A SEMICONDUCTOR JUNCTION (437/15) {7}
FOR 241  DF  .~ Doping during fluid growth of semiconductor material on substrate (437/81) {25}
FOR 255.~.~ Autodoping control (437/95) {1}
FOR 256  DF  .~.~.~> Compound formed from Group III and Group V elements (437/96)


DEFINITION

Classification: 438/FOR.255

Autodoping control:

Foreign art collection for processes involving the regulation of self-induced impurity production in a semiconductor material.