US PATENT SUBCLASS 438 / FOR 463
CONTROLLING DIFFUSION PROFILE BY OXIDATION (437/952)
Current as of:
June, 1999
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
FOR 463
CONTROLLING DIFFUSION PROFILE BY OXIDATION (437/952)
DEFINITION
Classification: 438/FOR.463
CONTROLLING DIFFUSION PROFILE BY OXIDATION:
Foreign art collection involving the regulation of a diffusion contour by an oxidation step.
