US PATENT SUBCLASS 438 / FOR 474
LOCALIZED HEATING CONTROL DURING FLUID GROWTH (437/963)
Current as of:
June, 1999
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
FOR 474
LOCALIZED HEATING CONTROL DURING FLUID GROWTH (437/963)
DEFINITION
Classification: 438/FOR.474
LOCALIZED HEATING CONTROL DURING FLUID GROWTH:
Foreign art collection involving the regulation of heat in a desired area during gaseous or liquid deposition of material.
