US PATENT SUBCLASS 438 / FOR 484
SOLID PHASE EPITAXIAL GROWTH (437/973)
Current as of:
June, 1999
Click
HD
for Main Headings
Click for
All Classes
Internet Version by
PATENTEC
© 1999
Terms of Use
438 /
HD
SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
FOR 484
SOLID PHASE EPITAXIAL GROWTH (437/973)
DEFINITION
Classification: 438/FOR.484
SOLID PHASE EPITAXIAL GROWTH:
Foreign art collection involving the deposition of material from solid to solid, e.g., migration of silicon through an aluminum layer on a silicon substrate.
