US PATENT SUBCLASS 438 / 568
.~.~.~.~ In capsule-type enclosure


Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

510  DF  INTRODUCTION OF CONDUCTIVITY MODIFYING DOPANT INTO SEMICONDUCTIVE MATERIAL {7}
542  DF  .~ Diffusing a dopant {15}
565  DF  .~.~ From vapor phase {3}
567  DF  .~.~.~ Solid source in operative relation with semiconductor region {1}
568.~.~.~.~ In capsule-type enclosure


DEFINITION

Classification: 438/568

In capsule-type enclosure:

(under subclass 567) Processes carried out in a small containerlike apparatus.